JPS6190030A - 圧電振動子圧力センサ装置 - Google Patents

圧電振動子圧力センサ装置

Info

Publication number
JPS6190030A
JPS6190030A JP21304084A JP21304084A JPS6190030A JP S6190030 A JPS6190030 A JP S6190030A JP 21304084 A JP21304084 A JP 21304084A JP 21304084 A JP21304084 A JP 21304084A JP S6190030 A JPS6190030 A JP S6190030A
Authority
JP
Japan
Prior art keywords
pressure
pressure sensor
diaphragm
piezoelectric vibrator
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21304084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435018B2 (en]
Inventor
Haruyoshi Oota
太田　治良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP21304084A priority Critical patent/JPS6190030A/ja
Publication of JPS6190030A publication Critical patent/JPS6190030A/ja
Publication of JPH0435018B2 publication Critical patent/JPH0435018B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP21304084A 1984-10-11 1984-10-11 圧電振動子圧力センサ装置 Granted JPS6190030A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21304084A JPS6190030A (ja) 1984-10-11 1984-10-11 圧電振動子圧力センサ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21304084A JPS6190030A (ja) 1984-10-11 1984-10-11 圧電振動子圧力センサ装置

Publications (2)

Publication Number Publication Date
JPS6190030A true JPS6190030A (ja) 1986-05-08
JPH0435018B2 JPH0435018B2 (en]) 1992-06-09

Family

ID=16632518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21304084A Granted JPS6190030A (ja) 1984-10-11 1984-10-11 圧電振動子圧力センサ装置

Country Status (1)

Country Link
JP (1) JPS6190030A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62173656A (ja) * 1986-01-28 1987-07-30 Mitsui Petrochem Ind Ltd 情報記録基板およびその製法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62173656A (ja) * 1986-01-28 1987-07-30 Mitsui Petrochem Ind Ltd 情報記録基板およびその製法

Also Published As

Publication number Publication date
JPH0435018B2 (en]) 1992-06-09

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